Beijing Century Kexin Scientific Instrument Co., Ltd
Home>Products>Flat plate scanning atomic force microscope FM Nanoview LSCL-AFM
Product Groups
Firm Information
  • Transaction Level
    VIP member
  • Contact
  • Phone
  • Address
    Room 102, Building D, Jingmao International Apartment, Jingtong Expressway Exit, Chaoyang District, Beijing
Contact Now
Flat plate scanning atomic force microscope FM Nanoview LSCL-AFM
Flat plate scanning atomic force microscope FM Nanoview LSCL-AFM
Product details

Commercialized atomic force microscope for combined mobile scanning of probes and samples;

Adopting a three-axis independent closed-loop piezoelectric translation scanning stage to achieve large-scale high-precision scanning;

Three axis independent scanning,XYZNot affecting each other, very suitable for 3D material and morphology detection;

Electric control sample moving table and lifting table, programmable multi-point position for fast and automated detection;

Longmen style scanning head design, marble base, vacuum adsorption and magnetic adsorption stage;
Intelligent needle insertion method for automatic detection of pressurized ceramic by motor control, protecting probes and samples;
High magnification assisted optical microscopy positioning, real-time observation and positioning of probes and sample scanning areas;

The closed-loop piezoelectric scanning table does not require nonlinear correction, and its nano characterization and measurement accuracy are superior to99.5%.

technical parameter

Working mode Contact mode, tap mode Sample weight ≤0.5Kg
Optional mode Friction/lateral force, amplitude/phase, magnetic/electrostatic force Z lifting platform Stepper motor drive control, minimum step size 10nm
Force spectrum curve F-Z force curve, RMS-Z curve Z lifting stroke 15mm (optional 20mm, 25mm)
XY scanning method Sample driven scanning, closed-loop piezoelectric translation scanning stage Optical positioning 5X optical objective lens (optional 10X/20X objective lens)
Z-scan method Probe driven scanning camera 5-megapixel digital CCD
XY scanning range Closed loop 100 × 100um Scanning rate 0.6Hz~30Hz
Z-scan range 5um Scanning angle 0~360°
Scanning resolution Closed loop XY direction 0.5nm, Z direction 0.05nm Operating environment Windows XP/7/8/10 operating system
XY sample stage Stepper motor drive control, with a movement accuracy of 1um communication interface USB2.0/3.0
XY movement stroke 100 × 100mm (optional 200 × 200mm, 300 × 300mm) Instrument structure Longmen style scanning head, marble base
Sample stage Diameter 100mm (optional 200mm, 300mm) Shock absorption method Spring suspension type (optional active shock absorber platform)

Application Cases

蓝宝石外延片.png表格1.png 平板扫描1.png

sAPPHIrE wAFEr/Scanning range1µm×1µm/Sa=1.7nm, Sq=2.08nm

砷化镓晶圆.png表格2.png 平板扫描2.png

Gallium arsenide wafer/Scanning range0.9µm×0.9µm/Sa=2.15nm, Sq=2.69nm

Online inquiry
  • Contacts
  • Company
  • Telephone
  • Email
  • WeChat
  • Verification Code
  • Message Content

Successful operation!

Successful operation!

Successful operation!